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Related Courses:

Fall 1999 Microfabrication Project Laboratory
Spring 2000 Silicon Biology
Microfabrication Project Laboratory
Fall 2000 Microfabrication Project Laboratory
Spring 2001 Microfabrication Project Laboratory
Fall 2001 Silicon Biology

Spring 2000: 6.151 Microfabrication Project Laboratory
Refinement and packaging of the interdigital accelerometer

Instructors
Professors Martin Schmidt and Scott Manalis

Class Members
Jeremy Hui
Nin Loh
Ole Nielsen
Oluwamuyiwa Olubuyide
Cecily Ryan
Joerg Scholvin

interferometric sensor motion stops

packaging