nanoscale sensing
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Related Courses:
Fall 1999 Microfabrication Project Laboratory
Spring 2000 Silicon Biology
Microfabrication Project Laboratory
Fall 2000 Microfabrication Project Laboratory
Spring 2001 Microfabrication Project Laboratory
Fall 2001 Silicon Biology

Spring 2001: 6.151 Microfabrication Project Laboratory

Presentations | Reading Materials | Fabrication Notebook
(all links coming soon)

Course Reference
Design and Fabrication of Microelectromechanical Devices
EECS 6.777

Reference Materials

E.B. Cooper, E.R. Post, S. Griffith, J. Levitan, S.R. Manalis, M.A. Schmidt, C.F. Quate, "High-resolution micromachined interferometric accelerometer,"Applied Physics Letters, 76 3316 (2000).
  A.A. Ayon, R. Braff, C.C. Lin, H.H. Sawin, M.A. Schmidt, "Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher," Journal of the Electrochemical Society 146 339 (1999).
J. Fritz, M.K. Baller, H.P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Guntherodt, Ch. Gerber, J.K. Gimzewski, "Translating Biomolecular Recognition into Nanomechanics," Science 288 316 (2000).
 

A.A. Ayon, K. Ishihara, R.A. Braff, H.H. Sawin, M.A. Schmidt,"Microfabrication and Testing of Suspended Structures Compatible with Silicon-On-Insulator," Journal of Vacuum Science Technology B 17 1589 (1999).

J. Fritz, M.K. Baller, H.P. Lang, T. Strunz, E. Meyer, H.-J. Guntherodt, E. Delamarche, Ch. Gerber, J.K. Gimzewski, "Stress at the Solid-Liquid Interface of Self-Assembled Monolayers on Gold Investigated with a Nanomechanical Sensor," American Chemical Society (2000).

 

M.K. Baller, H.P. Lang, J. Fritz, Ch. Gerber, J.K. Gimzewski, U. Drechsler, H. Rothuizen, M. Despont, P. Vettiger, F.M. Battiston, J.P. Ramseyer, P. Fornaro, E. Meyer, H.-J. Guntherodt,"A Cantilever Array-Based Artificial Nose," Ultramicroscopy 82 (2000).

A.M. Moulin, S.J. O'Shea, R.A. Bradley, P. Doyle, M.E. Welland, "Measuring Surface Induced Conformational Changes in Proteins," Langmuir 15 8116 (1999).

 

R. Raiteri, H.-J. Butt, M. Grattarola, "Changes in surface stress at the liquid/solid interface measured with a microcantilever," Electromechanica Acta 46 157 (2000).

G.G. Yaralioglu, A. Atalar, S.R. Manalis, C.F. Quate, "Analysis and Design of an Interdigital Cantilever as a Displacement Sensor," Journal of Applied Physics 83 7405 (1998).

 

H.F. Ji, K.M. Hansen, Z. Hu, T. Thundat, "Detection of pH Variation Using Modified Microcantilever Sensors," Sensors and Actuators B72 233 (2001).

T. Thundat, E. Finot, Z. Hu, R.H. Ritchie, G. Wu, A. Majumdar, "Chemical Sensing in Fourier Space," Applied Physics Letters 77 4061 (2000).

  M.Mao, T. Perazzo, O. Kwon, A. Majumdar, J. Varesi, P. Norton, "Direct-View Uncooled Micro-Optomechanical Infrared Camera" IEEE 100 (1999).
S.R. Manalis, S.C. Minne, A. Atalar, C.F. Quate, "Interdigital Cantilevers for Atomic Force Microscopy," Applied Physics Letters, 69 3944 (1996).
R. Berger, E. Delamarche, H.P. Long, C. Gerber, J.K. Gimzewski, E. Meyer, H.J. Guntherodt, "Surface Stress in the Self-Assembly of Alkanethiols on Gold," Science 276 2021 (1997).
R. Berger, E. Delamarche, H.P. Lang, Ch. Gerber, J.K. Gimzewski, E. Meyer, H.J. Guntherodt, "Surface stress in the self-assembly of alkanethiols on gold probed by a force microscopy technique," Applied Physics A 66 S55 (1998).